is a cornerstone of nanofabrication, using light to pattern tiny features on substrates. It's like painting with light, but instead of a brush, we use masks and special light-sensitive materials called photoresists.
While photolithography can create amazingly small structures, it has limits. The of light sets a boundary on how small we can go. To push past these limits, scientists have developed clever tricks like and .
Photolithography Process
Photoresist Application and Properties
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Top images from around the web for Photoresist Application and Properties
Review of recent advances in inorganic photoresists - RSC Advances (RSC Publishing) DOI:10.1039 ... View original
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Review of recent advances in inorganic photoresists - RSC Advances (RSC Publishing) DOI:10.1039 ... View original
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Frontiers | Recent Advances on Nanocomposite Resists With Design Functionality for Lithographic ... View original
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Review of recent advances in inorganic photoresists - RSC Advances (RSC Publishing) DOI:10.1039 ... View original
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Review of recent advances in inorganic photoresists - RSC Advances (RSC Publishing) DOI:10.1039 ... View original
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consists of a light-sensitive polymer applied as a thin film to the surface
Two main types of photoresists include positive and negative resists
Positive photoresists become more soluble when exposed to light, allowing exposed areas to be removed during development
Negative photoresists become less soluble when exposed to light, causing exposed areas to remain after development
Photoresist application involves spin coating the substrate to achieve uniform thickness (typically 0.5-2.5 μm)
removes excess solvent from the photoresist and improves adhesion to the substrate
UV Light Exposure and Mask Alignment
UV light source emits specific wavelengths (typically 365 nm, 248 nm, or 193 nm) for photoresist exposure
Mask aligner precisely positions the above the substrate
varies depending on photoresist sensitivity and desired pattern resolution
Contact, proximity, and projection are three primary exposure methods used in photolithography
offers high resolution but can damage the mask and substrate
reduces damage but sacrifices some resolution
uses sophisticated optics to project a reduced image of the mask onto the substrate
Mask Design and Fabrication
Photomask consists of a transparent substrate (quartz) with opaque patterns (chrome)
Mask patterns define the features to be transferred onto the substrate
often used for high-precision mask fabrication
contain only fully transparent and opaque regions
incorporate varying levels of opacity for creating 3D structures
Mask design software () used to create and optimize mask layouts
on masks ensure precise positioning relative to previous layers
Resolution and Limitations
Fundamental Resolution Limits
determines the smallest that can be reliably patterned
defines the theoretical resolution limit as R=k1NAλ
λ represents the wavelength of light used for exposure
NA denotes the numerical aperture of the projection lens system
k₁ factor accounts for process-related factors (typically 0.4-0.8)
Practical resolution limit often 30-50% larger than theoretical limit due to process variations
pushes resolution beyond the wavelength of light used
Diffraction Effects and Pattern Distortion
occurs when light passes through mask openings, causing pattern blurring
dominates in projection systems, while affects contact and proximity lithography
limits the minimum resolvable feature size
become significant for features approaching the wavelength of light
results from diffraction and photoresist properties
Proximity effects cause unintended exposure of nearby features, leading to pattern distortion
compensate for diffraction-induced distortions
Depth of Focus and Process Window
(DOF) defines the range of acceptable focus positions for pattern transfer
DOF calculated as DOF=k2NA2λ
k₂ factor typically ranges from 0.5 to 1.0
Smaller features and higher NA systems result in reduced DOF
represents the range of exposure and focus conditions that produce acceptable patterns
(FEM) used to characterize process window
Tight process windows require precise control of exposure dose and focus
Topography variations on the substrate can push features out of the DOF range
Advanced Techniques
Optical Proximity Correction and Mask Enhancement
(OPC) modifies mask patterns to compensate for optical effects
applies predefined corrections based on feature geometry
uses sophisticated simulations to predict and correct for optical effects
Serif features added to corners to reduce rounding
improve image contrast for isolated patterns
optimize mask patterns using iterative algorithms
(RET) encompass various advanced patterning strategies
Phase-Shift Masks and Interference Lithography
Phase-shift masks (PSM) manipulate the phase of light to improve image contrast
uses 180-degree phase shifts between adjacent features
combines phase shifting with partial transmission
relies solely on phase differences to create patterns
uses intersecting coherent light beams to create periodic patterns
split dense patterns across multiple exposures
(SADP) uses sidewall spacers to define features
Immersion and Extreme Ultraviolet Lithography
Immersion lithography replaces air with a high-refractive-index fluid between the lens and wafer
increases NA to 1.35, enabling 45 nm and 32 nm node production
High-index fluids and lens materials push immersion systems to even higher NA values